JPS6243339B2 - - Google Patents
Info
- Publication number
- JPS6243339B2 JPS6243339B2 JP15365282A JP15365282A JPS6243339B2 JP S6243339 B2 JPS6243339 B2 JP S6243339B2 JP 15365282 A JP15365282 A JP 15365282A JP 15365282 A JP15365282 A JP 15365282A JP S6243339 B2 JPS6243339 B2 JP S6243339B2
- Authority
- JP
- Japan
- Prior art keywords
- cassette
- wafer storage
- control rod
- storage cassette
- wafers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 235000012431 wafers Nutrition 0.000 claims description 64
- 238000003860 storage Methods 0.000 claims description 34
- 230000002093 peripheral effect Effects 0.000 claims description 3
- 230000006835 compression Effects 0.000 description 5
- 238000007906 compression Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 208000032368 Device malfunction Diseases 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000000452 restraining effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000035936 sexual power Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000000427 thin-film deposition Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Warehouses Or Storage Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15365282A JPS5943540A (ja) | 1982-09-02 | 1982-09-02 | ウエハ収納カセツトの搬送装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15365282A JPS5943540A (ja) | 1982-09-02 | 1982-09-02 | ウエハ収納カセツトの搬送装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5943540A JPS5943540A (ja) | 1984-03-10 |
| JPS6243339B2 true JPS6243339B2 (en]) | 1987-09-12 |
Family
ID=15567217
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15365282A Granted JPS5943540A (ja) | 1982-09-02 | 1982-09-02 | ウエハ収納カセツトの搬送装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5943540A (en]) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59100549A (ja) * | 1982-11-30 | 1984-06-09 | Nichiden Mach Ltd | ウエハ−移し替え装置 |
| JPH071782B2 (ja) * | 1985-03-22 | 1995-01-11 | 株式会社ニコン | キヤリアの搬送装置 |
| JPS6387427A (ja) * | 1986-09-29 | 1988-04-18 | Nikon Corp | 収納ケ−スの昇降装置 |
-
1982
- 1982-09-02 JP JP15365282A patent/JPS5943540A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5943540A (ja) | 1984-03-10 |
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